19 February 2018 Direct writing of three-dimensional Cu-based sensors using femtosecond laser reduction of CuO nanoparticles
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Abstract
2D and 3D metal microstructures are directly written using femtosecond laser reductive sintering of metal oxide nanoparticles. CuO nanoparticle solutions including CuO nanoparticles, a reductant agent, and a dispersant, were coated on glass substrates. Then, focused femtosecond laser pulses were irradiated onto the solution film to write the microstructures in air. Finally, non-irradiated CuO nanoparticles were removed. Cu-rich and Cu2O-rich microstructures were selectively fabricated by controlling the laser irradiation conditions. We demonstrated direct-writing of 2D and 3D Cu-based microstructures using femtosecond laser-induced reduction of CuO NPs. Using respective appropriate femtosecond laser conditions, 3D Cu-rich microstructures were obtained by a combined process of the dispensing coating and laser irradiation. The Cu-rich hot-film flow sensor which had microbridge structure, were successfully produced. This direct-writing technique is useful for fabricating various sensors on arbitral shaped substrates in air.
Conference Presentation
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Mizue Mizoshiri, Seiichi Hata, "Direct writing of three-dimensional Cu-based sensors using femtosecond laser reduction of CuO nanoparticles", Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 1052013 (19 February 2018); doi: 10.1117/12.2290166; https://doi.org/10.1117/12.2290166
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