Local temperature measurement during ultrafast laser 3D nanolithography writing

S. Varapnickas; D. Baziulyte-Paulaviciene; L. Jonušauskas; S. Sakirzanovas; M. Malinauskas

doi:10.1117/12.2287826

16 March 2018 Local temperature measurement during ultrafast laser 3D nanolithography writing

S. Varapnickas, D. Baziulyte-Paulaviciene, L. Jonušauskas, S. Sakirzanovas, M. Malinauskas

Proceedings Volume 10520, Laser-based Micro- and Nanoprocessing XII; 105201I (2018) https://doi.org/10.1117/12.2287826
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Luminescence measurements of upconverting nanocrystals (UCNCs) dispersed in SZ2080 hybrid prepolymer being processed under different laser polymerization regimes are presented. Er³⁺ ions doped β-NaYbF4 UCNCs were prepared by a one-step thermal decomposition method. The ratio of the 2H_11/2 → 4I_15/2 and 4S_3/2→ 4I_15/2 emission intensities under λ= 980 nm excitation in the range from 24 to 70°C confirmed to follow Boltzmann type distribution and enabled a self-referenced optical readout of the sample temperature changes. Variation of thermally-coupled spectral bands intensity ratio was observed under typical laser writing conditions (1030 nm, 300 fs, 200 kHz, NA = 0.8) and E(pulse) varying from below threshold to the optical breakdown. Average fitted temperature changes around polymerized voxel calculated to be ΔT1<3 K within polymerization window and increases up to ΔT2 ≈ 170 K in overexposing regime.

Citation Download Citation

S. Varapnickas, D. Baziulyte-Paulaviciene, L. Jonušauskas, S. Sakirzanovas, and M. Malinauskas "Local temperature measurement during ultrafast laser 3D nanolithography writing", Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 105201I (16 March 2018); https://doi.org/10.1117/12.2287826

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