23 February 2018 Electrical and optical 3D modelling of light-trapping single-photon avalanche diode
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Abstract
Single-photon avalanche diodes (SPADs) have been widely used to push the frontier of scientific research (e.g., quantum science and single-molecule fluorescence) and practical applications (e.g., Lidar). However, there is a typical compromise between photon detection efficiency and jitter distribution. The light-trapping SPAD has been proposed to break this trade-off by coupling the vertically incoming photons into a laterally propagating mode while maintaining a small jitter and a thin Si device layer. In this work, we provide a 3D-based optical and electrical model based on practical fabrication conditions and discuss about design parameters, which include surface texturing, photon injection position, device area, and other features.
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Tianzhe Zheng, Tianzhe Zheng, Kai Zang, Kai Zang, Matthew Morea, Matthew Morea, Muyu Xue, Muyu Xue, Ching-Ying Lu, Ching-Ying Lu, Xiao Jiang, Xiao Jiang, Qiang Zhang, Qiang Zhang, Theodore I. Kamins, Theodore I. Kamins, James S. Harris, James S. Harris, } "Electrical and optical 3D modelling of light-trapping single-photon avalanche diode", Proc. SPIE 10526, Physics and Simulation of Optoelectronic Devices XXVI, 105260Z (23 February 2018); doi: 10.1117/12.2287312; https://doi.org/10.1117/12.2287312
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