23 February 2018 Electrical and optical 3D modelling of light-trapping single-photon avalanche diode
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Single-photon avalanche diodes (SPADs) have been widely used to push the frontier of scientific research (e.g., quantum science and single-molecule fluorescence) and practical applications (e.g., Lidar). However, there is a typical compromise between photon detection efficiency and jitter distribution. The light-trapping SPAD has been proposed to break this trade-off by coupling the vertically incoming photons into a laterally propagating mode while maintaining a small jitter and a thin Si device layer. In this work, we provide a 3D-based optical and electrical model based on practical fabrication conditions and discuss about design parameters, which include surface texturing, photon injection position, device area, and other features.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tianzhe Zheng, Tianzhe Zheng, Kai Zang, Kai Zang, Matthew Morea, Matthew Morea, Muyu Xue, Muyu Xue, Ching-Ying Lu, Ching-Ying Lu, Xiao Jiang, Xiao Jiang, Qiang Zhang, Qiang Zhang, Theodore I. Kamins, Theodore I. Kamins, James S. Harris, James S. Harris, } "Electrical and optical 3D modelling of light-trapping single-photon avalanche diode", Proc. SPIE 10526, Physics and Simulation of Optoelectronic Devices XXVI, 105260Z (23 February 2018); doi: 10.1117/12.2287312; https://doi.org/10.1117/12.2287312

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