The design of Nb5N6 microbolometer detector for 0.3 THz detector

Chengtao Jiang; Xuecou Tu; Peng Xiao; Shimin Zhai; Xiaoqing Jia; Lin Kang; Jian Chen; Peiheng Wu

doi:10.1117/12.2292539

5 March 2018 The design of Nb₅N₆ microbolometer detector for 0.3 THz detector

Chengtao Jiang, Xuecou Tu, Peng Xiao, Shimin Zhai, Xiaoqing Jia, Lin Kang, Jian Chen, Peiheng Wu

Proceedings Volume 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI; 1053123 (2018) https://doi.org/10.1117/12.2292539
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We design and simulate planar antenna structure on the high- resistivity silicon substrate(ρ=1000Ω·cm) for the Nb5N6 micro- bolometer at the frequency range from 0.265 THz to 0.365 THz by CST Studio Suite. We have obtained the center frequency of the antenna at 0.3 THz by optimizing parameters of the antenna structure and the antenna has the very good radiation directivity. And the maximum directivity of the antenna is around 8.634 dBi at 0.3THz. The measured best voltage response of the Nb₅N₆ micro-bolometer detector is at 0.307 THz. The measured response frequency and the simulated S-parameter are in substantial agreement.

Citation Download Citation

Chengtao Jiang, Xuecou Tu, Peng Xiao, Shimin Zhai, Xiaoqing Jia, Lin Kang, Jian Chen, and Peiheng Wu "The design of Nb₅N₆ microbolometer detector for 0.3 THz detector", Proc. SPIE 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI, 1053123 (5 March 2018); https://doi.org/10.1117/12.2292539

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available