23 February 2018 Recent progress on the scalable fabrication of hybrid polymer/SiO2 nanophotonic cavity arrays with an encapsulated MoS2 film
Author Affiliations +
Proceedings Volume 10534, 2D Photonic Materials and Devices; 105340E (2018) https://doi.org/10.1117/12.2287126
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
We review1 the fully-scalable fabrication of a large array of hybrid molybdenum disulfide (MoS2) - silicon dioxide (SiO2) one-dimensional (1D), freestanding photonic-crystal cavities (PCCs) capable of enhancement of the MoS2 photoluminescence (PL) at the narrow cavity resonance. As demonstrated in our prior work [S. Hammer et al., Sci. Rep. 7, 7251 (2017)]1, geometric mode tuning over the wide spectral range of MoS2 PL can be achieved by changing the PC period. In this contribution, we provide a step-by-step description of the fabrication process and give additional detailed information on the degradation of MoS2 by XeF2 vapor. We avoid potential damage of the MoS2 monolayer during the crucial XeF2 etch by refraining from stripping the electron beam (e-beam) resist after dry etching of the photonic crystal pattern. The remaining resist on top of the samples encapsulates and protects the MoS2 film during the entire fabrication process. Albeit the thickness of the remaining resists strongly depends on the fabrication process, the resulting encapsulation of the MoS2 layer improves the confinement to the optical modes and gives rise to a potential enhancement of the light-matter interaction.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sebastian Hammer, Hans-Moritz Mangold, Ariana E. Nguyen, Dominic Martinez-Ta, Sahar Naghibi Alvillar, Ludwig Bartels, Hubert J. Krenner, "Recent progress on the scalable fabrication of hybrid polymer/SiO2 nanophotonic cavity arrays with an encapsulated MoS2 film", Proc. SPIE 10534, 2D Photonic Materials and Devices, 105340E (23 February 2018); doi: 10.1117/12.2287126; https://doi.org/10.1117/12.2287126
PROCEEDINGS
10 PAGES


SHARE
Back to Top