23 February 2018 Multi-parameter estimation of high-Q silicon rich nitride resonators using optical frequency domain reflectometry
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Abstract
Many linear and nonlinear optics applications rely on micro-resonators (MRRs) with carefully designed dispersion and coupling rate coefficients. These parameters are however challenging to measure for MRRs based on high-confinement optical waveguides. In this paper, we report on the use of optical frequency domain reflectometry (OFDR) for the measurement of group velocity dispersion (GVD), coupling coefficients and round-trip loss, in high-Q (Qi ∼ 0.3 × 106) silicon-rich nitride MRRs. This technique allows for retrieving the GVD coefficients, intrinsic losses and coupling coefficients for each transverse mode in the resonator, thus providing very valuable feed-back information from experiments to the design flow step.
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Luis A. Bru, Zhichao Ye, Daniel Pastor, Pascual Muñoz, "Multi-parameter estimation of high-Q silicon rich nitride resonators using optical frequency domain reflectometry", Proc. SPIE 10535, Integrated Optics: Devices, Materials, and Technologies XXII, 1053518 (23 February 2018); doi: 10.1117/12.2290641; https://doi.org/10.1117/12.2290641
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