22 February 2018 New dynamic silicon photonic components enabled by MEMS technology
Author Affiliations +
Proceedings Volume 10537, Silicon Photonics XIII; 1053711 (2018) https://doi.org/10.1117/12.2297588
Event: SPIE OPTO, 2018, San Francisco, California, United States
Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Carlos Errando-Herranz, Carlos Errando-Herranz, Pierre Edinger, Pierre Edinger, Marco Colangelo, Marco Colangelo, Joel Björk, Joel Björk, Samy Ahmed, Samy Ahmed, Göran Stemme, Göran Stemme, Frank Niklaus, Frank Niklaus, Kristinn B. Gylfason, Kristinn B. Gylfason, "New dynamic silicon photonic components enabled by MEMS technology", Proc. SPIE 10537, Silicon Photonics XIII, 1053711 (22 February 2018); doi: 10.1117/12.2297588; https://doi.org/10.1117/12.2297588

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