Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics

Soon Thor Lim; Alagappan Gandhi; Jun Rong Ong; Thomas Ang; Ching Eng Png; Ding Lu; Norman Soo Seng Ang; Ee Jin Teo; Jinghua Teng

doi:10.1117/12.2288079

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22 February 2018 Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics

Soon Thor Lim, Alagappan Gandhi, Jun Rong Ong, Thomas Ang, Ching Eng Png, Ding Lu, Norman Soo Seng Ang, Ee Jin Teo, Jinghua Teng

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Proceedings Volume 10537, Silicon Photonics XIII; 105371C (2018) https://doi.org/10.1117/12.2288079
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

SiO_xN_y shows promises for bright emitters of single photons. We successfully fabricated ultra-low-loss SiOxNy waveguide and AWG with low insertion loss <1dB and <3dB total loss (<2dB on-chip loss and <1dB coupling loss) at 1310nm.

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Soon Thor Lim, Alagappan Gandhi, Jun Rong Ong, Thomas Ang, Ching Eng Png, Ding Lu, Norman Soo Seng Ang, Ee Jin Teo, and Jinghua Teng "Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics", Proc. SPIE 10537, Silicon Photonics XIII, 105371C (22 February 2018); https://doi.org/10.1117/12.2288079

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