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22 February 2018 Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics
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Proceedings Volume 10537, Silicon Photonics XIII; 105371C (2018) https://doi.org/10.1117/12.2288079
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
SiOxNy shows promises for bright emitters of single photons. We successfully fabricated ultra-low-loss SiOxNy waveguide and AWG with low insertion loss <1dB and <3dB total loss (<2dB on-chip loss and <1dB coupling loss) at 1310nm.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Soon Thor Lim, Alagappan Gandhi, Jun Rong Ong, Thomas Ang, Ching Eng Png, Ding Lu, Norman Soo Seng Ang, Ee Jin Teo, and Jinghua Teng "Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics", Proc. SPIE 10537, Silicon Photonics XIII, 105371C (22 February 2018); https://doi.org/10.1117/12.2288079
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