22 February 2018 Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics
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Proceedings Volume 10537, Silicon Photonics XIII; 105371C (2018) https://doi.org/10.1117/12.2288079
Event: SPIE OPTO, 2018, San Francisco, California, United States
SiOxNy shows promises for bright emitters of single photons. We successfully fabricated ultra-low-loss SiOxNy waveguide and AWG with low insertion loss <1dB and <3dB total loss (<2dB on-chip loss and <1dB coupling loss) at 1310nm.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Soon Thor Lim, Soon Thor Lim, Alagappan Gandhi, Alagappan Gandhi, Jun Rong Ong, Jun Rong Ong, Thomas Ang, Thomas Ang, Ching Eng Png, Ching Eng Png, Ding Lu, Ding Lu, Norman Soo Seng Ang, Norman Soo Seng Ang, Ee Jin Teo, Ee Jin Teo, Jinghua Teng, Jinghua Teng, } "Silicon-nitride/oxynitride wavelength demultiplexer and resonators for quantum photonics", Proc. SPIE 10537, Silicon Photonics XIII, 105371C (22 February 2018); doi: 10.1117/12.2288079; https://doi.org/10.1117/12.2288079

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