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23 March 2018 Two-dimensional beam steering device using double periodic Si photonic crystal waveguide
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We demonstrate a non-mechanical on-chip optical beam steering device using the photonic crystal waveguide with a double periodic structure that repeats the increase and decrease of hole diameter. Guided slow light in this waveguide is radiated to be a light beam. Slow light shows strong dispersion, which allows a deflection angle of approximately 10 times that of a normal diffraction grating. We fabricated the device using complementary metal oxide semiconductor process and observed a beam deflection angle of 24° in the longitudinal direction with maintaining the divergence angle of 0.3° when the wavelength was changed by 27 nm. Four such waveguides were integrated, and one of them was selected by a Mach-Zehnder optical switch. Then, the lateral beam steering was obtained when a cylindrical lens was placed above these waveguides. By combining the longitudinal and lateral beam steering, the collimated beam was scanned two-dimensionally with 80 × 4 resolution points.
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Hiroshi Abe, Moe Takeuchi, Goro Takeuchi, Hiroyuki Ito, Tomoki Yokokawa, Keisuke Kondo, Yuya Furukado, and Toshihiko Baba "Two-dimensional beam steering device using double periodic Si photonic crystal waveguide", Proc. SPIE 10541, Photonic and Phononic Properties of Engineered Nanostructures VIII, 105410P (23 March 2018);

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