22 February 2018 Fabricating a 2D imaging device using aerosol PZT process
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Here we present a new rapid prototyped PZT MEMS actuator for potential 2D scanning endoscopic application. The proposed 6.1 mm x 7.1 mm x 5 μm thick film PZT push-pull actuator made by directly deposited on a thin 100 μm thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear 2D vibration using 1-D actuation. Initial fabrication results, electrical impedance, mechanical will be presented and discussed.
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Wei-Chih Wang, Wei-Chih Wang, Peng-Jyun Chen, Peng-Jyun Chen, Yu-Hsin Chiang, Yu-Hsin Chiang, Chao-Ting Chen, Chao-Ting Chen, Wen-Jong Wu, Wen-Jong Wu, } "Fabricating a 2D imaging device using aerosol PZT process", Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 105440Q (22 February 2018); doi: 10.1117/12.2291353; https://doi.org/10.1117/12.2291353

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