A new method for electrode deposition using a SU-8 shadow mask in a 3D electro-wetting lenticular lens chamber structure

Dooseub Shin; Gyo Hyun Koo; Yong Hyub Won

doi:10.1117/12.2289190

22 February 2018 A new method for electrode deposition using a SU-8 shadow mask in a 3D electro-wetting lenticular lens chamber structure

Dooseub Shin, Gyo Hyun Koo, Yong Hyub Won

Author Affiliations +

Proceedings Volume 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI; 105441G (2018) https://doi.org/10.1117/12.2289190
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

There are various methods of patterning electrodes in a MEMS process. However, it is difficult to pattern electrodes in a 3-dimensional structure. One way to overcome these drawbacks is to use a shadow mask. This approach allows electrodes to be deposited on selected areas even if the substrate is not flat. In this paper, a SU-8 shadow mask that is inexpensive and easy to fabricate is proposed. Another advantage of the SU-8 shadow mask is reusability. Most importantly, it is possible to deposit a microscale electrode on 3-dimensional structure with the SU-8 shadow mask. Here, the electrode was deposited on the chamber of an electro-wetting lenticular lens. The chamber structure of the electrowetting lenticular lens has a long reversed trapezoidal shape. In order to adjust the optical axis in the electro-wetting lenticular lens, electrodes should be deposited on each sidewall of the chamber. It was verified that the electrodes were successfully separated with use of the SU-8 shadow mask and the width of the electrode was 50μm.

Citation Download Citation

Dooseub Shin, Gyo Hyun Koo, and Yong Hyub Won "A new method for electrode deposition using a SU-8 shadow mask in a 3D electro-wetting lenticular lens chamber structure", Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 105441G (22 February 2018); https://doi.org/10.1117/12.2289190

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