22 February 2018 A low-cost 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy
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Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450G (2018) https://doi.org/10.1117/12.2288780
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
A low-cost, compact electrostatic deformable mirror is developed using widely available polymeric materials. The fabrication method offers exceptional post-fabrication mirror flatness error of < 250 nm RMS, which can be reduced below 22 nm at best-flat. A custom real-time control system is also constructed and high fidelity reconstruction of Zernike modes up to the 4th radial order is presented. Real-time wavefront correction is also demonstrated using a spatial-carrier laser interferometer as a wavefront sensor.
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Kaustubh Banerjee, Kaustubh Banerjee, Pouya Rajaeipour, Pouya Rajaeipour, Çağlar Ataman, Çağlar Ataman, Hans Zappe, Hans Zappe, } "A low-cost 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450G (22 February 2018); doi: 10.1117/12.2288780; https://doi.org/10.1117/12.2288780
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