22 February 2018 Novel micro-fabricated Fabry-Perot filters in infrared
Author Affiliations +
Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450I (2018) https://doi.org/10.1117/12.2285363
Event: SPIE OPTO, 2018, San Francisco, California, United States
We have designed, fabricated and tested narrow-band Fabry-Perot filters in the infrared using gold porous mirrors and a silicon spacer layer. The filter peaks at 10 μm and 15 μm have approximately 10% transmission and a 1.5% linewidth. A Fabry-Perot structure with plane metal layers having a similar linewidth would have a transmission of only 0.2%. Thus, for the same linewidth we have improved the transmission by a factor of 50. Apart from the optical enhancements, these filters also have the advantage that they can be made inexpensively in a standard silicon MEMS technology and that their resonances can be finely tuned through post processing.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Branislav Timotijevic, Branislav Timotijevic, Andrea Dunbar, Andrea Dunbar, Arno Hoogerwerf, Arno Hoogerwerf, Nemanja Niketic, Nemanja Niketic, Ross Stanley, Ross Stanley, Michel Despont, Michel Despont, } "Novel micro-fabricated Fabry-Perot filters in infrared", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450I (22 February 2018); doi: 10.1117/12.2285363; https://doi.org/10.1117/12.2285363

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