22 February 2018 Novel micro-fabricated Fabry-Perot filters in infrared
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Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450I (2018) https://doi.org/10.1117/12.2285363
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
We have designed, fabricated and tested narrow-band Fabry-Perot filters in the infrared using gold porous mirrors and a silicon spacer layer. The filter peaks at 10 μm and 15 μm have approximately 10% transmission and a 1.5% linewidth. A Fabry-Perot structure with plane metal layers having a similar linewidth would have a transmission of only 0.2%. Thus, for the same linewidth we have improved the transmission by a factor of 50. Apart from the optical enhancements, these filters also have the advantage that they can be made inexpensively in a standard silicon MEMS technology and that their resonances can be finely tuned through post processing.
Conference Presentation
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Branislav Timotijevic, Branislav Timotijevic, Andrea Dunbar, Andrea Dunbar, Arno Hoogerwerf, Arno Hoogerwerf, Nemanja Niketic, Nemanja Niketic, Ross Stanley, Ross Stanley, Michel Despont, Michel Despont, } "Novel micro-fabricated Fabry-Perot filters in infrared", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450I (22 February 2018); doi: 10.1117/12.2285363; https://doi.org/10.1117/12.2285363
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