22 February 2018 MEMS-based widely tunable external cavity diode laser
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Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450J (2018) https://doi.org/10.1117/12.2287849
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
Tunable laser sources are used in a wide range of novel applications such as spectroscopy, biomedicine or gas sensing techniques. New requirements in terms of size, tuning speed and output power are addressed with our work.

We present a miniaturized external cavity diode laser concept which will be compared with well-known laser systems such as distributed feedback (DFB) lasers. DFB lasers suffer high internal losses due to the overlap of the DFB grating with the optical waveguide. Our concept of Micro Electro Mechanical Systems (MEMS) based lasers are stabilized with a transmission grating, resulting in significantly less losses. Furthermore, the tuning of the diffraction efficiency of the gratings allows the optimization of the output power and the overall tuning range, which is measured to be one order of magnitude larger than what can be achieved with DFBs. It is also important to point out the tuning speed of the MEMS lasers due to the fast nature of the tilting capabilities of the MEMS actuators. Excellent relative intensity noise and narrow linewidth features are present in these laser systems due to the low noise driving electronics for both the diode lasers and the MEMS actuators.

The high output power and the low linewidth will enable a higher sensitivity and resolution for a wide range of applications. The performance of the MEMS laser systems will be presented, being suitable for applications such as Raman spectroscopy or tunable diode laser absorption spectroscopy (TDLAS) in the wavelength ranges of 780 nm and 920 nm.
Conference Presentation
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Álvaro Jiménez, Tobias Milde, Hervé Tatenguem, Martin Honsberg, Guillermo Carpintero, James O'Gorman, Joachim R. Sacher, "MEMS-based widely tunable external cavity diode laser", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450J (22 February 2018); doi: 10.1117/12.2287849; https://doi.org/10.1117/12.2287849
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