21 March 2018 Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Author Affiliations +
Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450W (2018) https://doi.org/10.1117/12.2290588
Event: SPIE OPTO, 2018, San Francisco, California, United States
A translatory MOEMS actuator with extraordinarily large stroke - especially developed for fast optical path-length modulation in miniaturized FT-spectrometers (FTS) designed for NIR spectral region (800 nm – 2500 nm) - is presented. A precise translational out-of-plane oscillation at 260 Hz with a stroke of up to 700 μm and minimized dynamic mirror deformation of 80 nm is realized by means of an optimized MEMS design. The MOEMS device is driven electro-statically near resonance and is manufactured in a CMOS-compatible SOI process. Due to the significant viscous gas damping, dominated by the drag resistance of the comparatively large mirror plate with 5mm diameter, the resonant MEMS device has to operate under reduced pressure. A mirror stroke of 700 μm at a driving voltage of 4V is achieved by hermetic encapsulation of the actuator at at a maximal pressure of 3.2 Pa. For FTS system integration the MOEMS actuator has been encapsulated in an optical vacuum wafer-level package (VWLP) to guarantee a long-term stable vacuum pressure of 0.1 Pa and lifetime t ≥ 10a.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thilo Sandner, Thilo Sandner, Eric Gaumont, Eric Gaumont, Thomas Grasshoff, Thomas Grasshoff, Gerald Auböck, Gerald Auböck, Andreas Kenda, Andreas Kenda, Thomas Gisler, Thomas Gisler, Sergiu Langa, Sergiu Langa, Andreas Herrmann, Andreas Herrmann, Jan Grahmann, Jan Grahmann, } "Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers ", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450W (21 March 2018); doi: 10.1117/12.2290588; https://doi.org/10.1117/12.2290588


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