The Role Of Unsteady Adiabatic Expansion In Laser Sputtering

Roger Kelly

doi:10.1117/12.951640

15 August 1989 The Role Of Unsteady Adiabatic Expansion In Laser Sputtering

Roger Kelly

Proceedings Volume 1056, Photochemistry in Thin Films; (1989) https://doi.org/10.1117/12.951640
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

When the number of monolayers sputtered per particle or per pulse is sufficiently small the emitted particles fly freely from the target surface. For yields comparable to 0.5 monolayer a limited number of gas-phase interactions occurs, leading to a Knudsen layer. As a result the particles develop moderate forward peaking ~cos4 θ) and begin to flow (Mach number ≈ 1). It is common, however, for yields to exceed 0.5 monolayer. We show that the resulting gas-phase interactions cause the Knudsen layer to evolve into an unsteady, adiabatic expansion which is formally like a gun which fires a finite charge into an infinite, one-dimensional barrel.

Citation Download Citation

Roger Kelly "The Role Of Unsteady Adiabatic Expansion In Laser Sputtering", Proc. SPIE 1056, Photochemistry in Thin Films, (15 August 1989); https://doi.org/10.1117/12.951640

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