Development and optical performance tests of the Si immersed grating demonstrator for E-ELT METIS

Ramon Navarro; Tibor Agócs; Lars Venema; Aaldert H. van Amerongen; Michiel Rodenhuis; Ruud W. M. Hoogeveen; Tonny Coppens; Bernhard R. Brandl; Ramon Vink

doi:10.1117/12.2296128

25 September 2017 Development and optical performance tests of the Si immersed grating demonstrator for E-ELT METIS

Ramon Navarro, Tibor Agócs, Lars Venema, Aaldert H. van Amerongen, Michiel Rodenhuis, Ruud W. M. Hoogeveen, Tonny Coppens, Bernhard R. Brandl, Ramon Vink

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Proceedings Volume 10562, International Conference on Space Optics — ICSO 2016; 1056257 (2017) https://doi.org/10.1117/12.2296128
Event: International Conference on Space Optics — ICSO 2016, 2016, Biarritz, France

Abstract

Immersed gratings offer several advantages over conventional gratings: more compact spectrograph designs, and by using standard semiconductor industry techniques, higher diffraction-efficiency and lower stray-light can be achieved. We present the optical tests of the silicon immersed grating demonstrator for the Mid-infrared E-ELT Imager and Spectrograph, METIS. We detail the interferometric tests that were done to measure the wavefront-error and present the results of the throughput and stray-light measurements. We also elaborate on the challenges encountered and lessons learned during the immersed grating demonstrator test campaign that helped us to improve the fabrication processes of the grating patterning on the wafer.

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Ramon Navarro, Tibor Agócs, Lars Venema, Aaldert H. van Amerongen, Michiel Rodenhuis, Ruud W. M. Hoogeveen, Tonny Coppens, Bernhard R. Brandl, and Ramon Vink "Development and optical performance tests of the Si immersed grating demonstrator for E-ELT METIS", Proc. SPIE 10562, International Conference on Space Optics — ICSO 2016, 1056257 (25 September 2017); https://doi.org/10.1117/12.2296128

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