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17 November 2017 Light scattering techniques for the characterization of optical components
M. Hauptvogel, S. Schröder, T. Herffurth, M. Trost, A. von Finck, A. Duparré, T. Weigel
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Proceedings Volume 10563, International Conference on Space Optics — ICSO 2014; 1056347 (2017) https://doi.org/10.1117/12.2304146
Event: International Conference on Space Optics — ICSO 2014, 2014, Tenerife, Canary Islands, Spain
Abstract
The rapid developments in optical technologies generate increasingly higher and sometimes completely new demands on the quality of materials, surfaces, components, and systems. Examples for such driving applications are the steadily shrinking feature sizes in semiconductor lithography, nanostructured functional surfaces for consumer optics, and advanced optical systems for astronomy and space applications. The reduction of surface defects as well as the minimization of roughness and other scatter-relevant irregularities are essential factors in all these areas of application. Quality-monitoring for analysing and improving those properties must ensure that even minimal defects and roughness values can be detected reliably. Light scattering methods have a high potential for a non-contact, rapid, efficient, and sensitive determination of roughness, surface structures, and defects.
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M. Hauptvogel, S. Schröder, T. Herffurth, M. Trost, A. von Finck, A. Duparré, and T. Weigel "Light scattering techniques for the characterization of optical components", Proc. SPIE 10563, International Conference on Space Optics — ICSO 2014, 1056347 (17 November 2017); https://doi.org/10.1117/12.2304146
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KEYWORDS
Light scattering
Scattering
Bidirectional reflectance transmission function
Mirrors
Scatter measurement
Optical components
Astronomical imaging
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