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3 April 2018 Microfabrication of high performance optical diaphragm by plasma ion beam etching technology
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Proceedings Volume 10570, International Conference on Space Optics — ICSO 1997; 1057023 (2018) https://doi.org/10.1117/12.2326629
Event: International Conference on Space Optics 1997, 1997, Toulouse, France
Abstract
This paper, “Microfabrication of high performance optical diaphragm by plasma ion beam etching technology," was presented as part of International Conference on Space Optics—ICSO 1997, held in Toulouse, France.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Agnes Mestreau, Henri Bernardet, Guy Dancoing, Xavier Godechot, Christian Pezant, Vincent Stenger, Bernard Cousin, Pierre Etcheto, and Georges Otrio "Microfabrication of high performance optical diaphragm by plasma ion beam etching technology", Proc. SPIE 10570, International Conference on Space Optics — ICSO 1997, 1057023 (3 April 2018); https://doi.org/10.1117/12.2326629
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