Speckle metrology for extreme ultra-violet lithography

A. Shanker; L. Waller; G. Gunjala; A. Wojdyla; D. Voronov; P. Naulleau

doi:10.1117/12.2299605

1 June 2018 Speckle metrology for extreme ultra-violet lithography

A. Shanker, L. Waller, G. Gunjala, A. Wojdyla, D. Voronov, P. Naulleau

Proceedings Volume 10583, Extreme Ultraviolet (EUV) Lithography IX; 105830T (2018) https://doi.org/10.1117/12.2299605
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Stochastic effects in extreme ultraviolet lithography are contributed by the EUV optical speckle and diffusion chemistry of the photoresist. These cause line edge roughness (LER) in the etched features, shrinking the process window at the sub-20nm lithography node. We explore possibilities of utilizing the speckle for optical metrology and resist characterization by measuring the latent image of the EUV light on photoresist. The latent image on a standard photoresist measured using atomic force microscopy is shown to linearly depend on the aerial image intensity within a specific dose range, hence serving as an in-situ imaging modality to measure the EUV aerial image without a camera. Potential applications include EUV wavefront measurement, resist characterization, and LER engineering.

Conference Presentation

Citation Download Citation

A. Shanker, L. Waller, G. Gunjala, A. Wojdyla, D. Voronov, and P. Naulleau "Speckle metrology for extreme ultra-violet lithography", Proc. SPIE 10583, Extreme Ultraviolet (EUV) Lithography IX, 105830T (1 June 2018); https://doi.org/10.1117/12.2299605

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available