19 March 2018 Nanoimprint lithography using gas permeable template II
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Abstract
We have been trying to improve nanoimprint lithography performance through modification of template materials. We have reported a biomass based template with gas permeability which decreases transcriptional defects on template materials caused by involved solvents and cracked gasses generated from imprinted materials. (SPIE2016 and 2017) The line patterning results using the biomass based gas permeable template were better to reduce the line pattern failure as compared with that of quartz based template as the standard reference. In this study, we will report a mechanical property improvement of the template by blending cellulose nanofiber (CNF) to the biomass template. The blended template showed improved gas transmission coefficient and mechanical properties than non-blended template. The proposed nanoimprint lithography using biomass based template with gas permeable and gaseous adsorption is one of the most promising processes ready to use for mass-production of nanoscale devices.
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Makoto Hanabata, Makoto Hanabata, Satoshi Takei, Satoshi Takei, Shinya Nakajima, Shinya Nakajima, Naoto Sugino, Naoto Sugino, Yoko Matsumoto, Yoko Matsumoto, Atsushi Sekiguchi, Atsushi Sekiguchi, } "Nanoimprint lithography using gas permeable template II", Proc. SPIE 10584, Novel Patterning Technologies 2018, 1058415 (19 March 2018); doi: 10.1117/12.2295147; https://doi.org/10.1117/12.2295147
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