13 March 2018 Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source
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Abstract
We present preliminary through-pellicle imaging using a 30nm tabletop extreme ultraviolet (EUV) coherent diffractive imaging microscope. We show that even in a non-optimized setup, this technique enables through-pellicle imaging of a sample with no detectable impact on image fidelity or resolution.
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Charles S. Bevis, Charles S. Bevis, Robert M. Karl, Robert M. Karl, Bin Wang, Bin Wang, Yuka Esashi, Yuka Esashi, Michael Tanksalvala, Michael Tanksalvala, Christina L. Porter, Christina L. Porter, Peter Johnsen, Peter Johnsen, Daniel E. Adams, Daniel E. Adams, Margaret M. Murnane, Margaret M. Murnane, Henry C. Kapteyn, Henry C. Kapteyn, } "Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105852O (13 March 2018); doi: 10.1117/12.2307861; https://doi.org/10.1117/12.2307861
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