Feed-forward alignment correction for advanced overlay process control using a standalone alignment station "Litho Booster"

Takehisa Yahiro; Junpei Sawamura; Tomonori Dosho; Yuji Shiba; Satoshi Ando; Jun Ishikawa; Masahiro Morita; Yuichi Shibazaki

doi:10.1117/12.2297300

13 March 2018 Feed-forward alignment correction for advanced overlay process control using a standalone alignment station "Litho Booster"

Takehisa Yahiro, Junpei Sawamura, Tomonori Dosho, Yuji Shiba, Satoshi Ando, Jun Ishikawa, Masahiro Morita, Yuichi Shibazaki

Author Affiliations +

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 105852Z (2018) https://doi.org/10.1117/12.2297300
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

One of the main components of an On-Product Overlay (OPO) error budget is the process induced wafer error. This necessitates wafer-to-wafer correction in order to optimize overlay accuracy. This paper introduces the Litho Booster (LB), standalone alignment station as a solution to improving OPO. LB can execute high speed alignment measurements without throughput (THP) loss. LB can be installed in any lithography process control loop as a metrology tool, and is then able to provide feed-forward (FF) corrections to the scanners. In this paper, the detailed LB design is described and basic LB performance and OPO improvement is demonstrated. Litho Booster’s extendibility and applicability as a solution for next generation manufacturing accuracy and productivity challenges are also outlined

Citation Download Citation

Takehisa Yahiro, Junpei Sawamura, Tomonori Dosho, Yuji Shiba, Satoshi Ando, Jun Ishikawa, Masahiro Morita, and Yuichi Shibazaki "Feed-forward alignment correction for advanced overlay process control using a standalone alignment station "Litho Booster"", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105852Z (13 March 2018); https://doi.org/10.1117/12.2297300

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available