Cymer has also developed new light source modules with 33% longer life in an effort to reduce raw and associated resource consumption. In addition, a progress report is included regarding the improvements developed to reduce light source energy consumption.
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Yzzer Roman, Ted Cacouris, Kumar Raja Guvindan Raju, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Eric Mason, David Manley, Saptaparna Das, "DUV light source sustainability achievements and next steps," Proc. SPIE 10587, Optical Microlithography XXXI, 1058716 (21 March 2018);