21 March 2018 DUV light source sustainability achievements and next steps
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Key sustainability opportunities have been executed in support of corporate initiatives to reduce the environmental footprint and decrease the running cost of DUV light sources. Previously, substantial neon savings were demonstrated over several years through optimized gas management technologies. Beyond this work, Cymer is developing the XLGR 100, a self-contained neon recycling system, to enable minimal gas consumption. The high efficiency results of the XLGR 100 in a production factory are validated in this paper.

Cymer has also developed new light source modules with 33% longer life in an effort to reduce raw and associated resource consumption. In addition, a progress report is included regarding the improvements developed to reduce light source energy consumption.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yzzer Roman, Yzzer Roman, Ted Cacouris, Ted Cacouris, Kumar Raja Guvindan Raju, Kumar Raja Guvindan Raju, Dinesh Kanawade, Dinesh Kanawade, Walt Gillespie, Walt Gillespie, Siqi Luo, Siqi Luo, Eric Mason, Eric Mason, David Manley, David Manley, Saptaparna Das, Saptaparna Das, } "DUV light source sustainability achievements and next steps", Proc. SPIE 10587, Optical Microlithography XXXI, 1058716 (21 March 2018); doi: 10.1117/12.2299387; https://doi.org/10.1117/12.2299387

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