PB-DTCO flow can generate plenty of test patterns for model creation and yield gaining, classify candidate patterns systematically and furthermore build up bank includes pairs of match and optimization patterns quickly. Those banks can be used for hotspot fixing, layout optimization and also be referenced for the next technology node. Therefore, the combination of PB-DTCO flow with OPC not only benefits for reducing the time-to-market but also flexible and can be easily adapted to diversity OPC flow.
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Yi-Chieh Chen, Tsung-Han Li, Hung-Yu Lin, Kao-Tun Chen, Chun-Sheng Wu, Ya-Chieh Lai, Philippe Hurat, "A portable pattern-based design technology co-optimization flow to reduce optical proximity correction run-time," Proc. SPIE 10588, Design-Process-Technology Co-optimization for Manufacturability XII, 1058810 (20 March 2018);