Prediction and validation of the polarization performance of high-numerical aperture inspection lenses

Stephan Fahr; Jan Werschnik; Matthias Bening; Tim Baldsiefen

doi:10.1117/12.2286587

27 November 2017 Prediction and validation of the polarization performance of high-numerical aperture inspection lenses

Stephan Fahr, Jan Werschnik, Matthias Bening, Tim Baldsiefen

Proceedings Volume 10590, International Optical Design Conference 2017; 1059006 (2017) https://doi.org/10.1117/12.2286587
Event: International Optical Design Conference - IODC 2017, 2017, Denver, United States

Abstract

In this work, we show how to predict the polarization-performance of high-numerical aperture optical systems. Various important influences, such as coating-induced phase change, stress induced birefringence, or the quality of the raw material are investigated.

Citation Download Citation

Stephan Fahr, Jan Werschnik, Matthias Bening, and Tim Baldsiefen "Prediction and validation of the polarization performance of high-numerical aperture inspection lenses", Proc. SPIE 10590, International Optical Design Conference 2017, 1059006 (27 November 2017); https://doi.org/10.1117/12.2286587

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