27 November 2017 Prediction and validation of the polarization performance of high-numerical aperture inspection lenses
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Proceedings Volume 10590, International Optical Design Conference 2017; 1059006 (2017) https://doi.org/10.1117/12.2286587
Event: International Optical Design Conference - IODC 2017, 2017, Denver, United States
Abstract
In this work, we show how to predict the polarization-performance of high-numerical aperture optical systems. Various important influences, such as coating-induced phase change, stress induced birefringence, or the quality of the raw material are investigated.
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Stephan Fahr, Stephan Fahr, Jan Werschnik, Jan Werschnik, Matthias Bening, Matthias Bening, Tim Baldsiefen, Tim Baldsiefen, } "Prediction and validation of the polarization performance of high-numerical aperture inspection lenses", Proc. SPIE 10590, International Optical Design Conference 2017, 1059006 (27 November 2017); doi: 10.1117/12.2286587; https://doi.org/10.1117/12.2286587
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