1 December 2017 Infrared wire-grid polarizer with sol-gel antireflection films on both sides
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Proceedings Volume 10603, Photonics, Devices, and Systems VII; 106030U (2017) https://doi.org/10.1117/12.2288835
Event: Photonics Prague 2017, 2017, Prague, Czech Republic
Abstract
We fabricated an infrared wire-grid polarizer with the high transverse magnetic (TM) polarization transmittance and high extinction ratio by soft imprint lithography, sol-gel method, and Al shadow coating processes. A zilconia film was coated on Si substrate by using sol-gel method and spin coating method. Then, sol-gel zirconia grating was formed on the back side using imprinting using a silicone mold. The polarizer was produced by depositing Al obliquely on the grating. The TM transmittance of the fabricated element was greater than 80% at a wavelength of 4.8 μm. The sol-gel zilconia films acted as antireflection films. The extinction ratio exceeded 26 dB at its wavelength.
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Itsunari Yamada, Yoshiro Ishihara , "Infrared wire-grid polarizer with sol-gel antireflection films on both sides ", Proc. SPIE 10603, Photonics, Devices, and Systems VII, 106030U (1 December 2017); doi: 10.1117/12.2288835; https://doi.org/10.1117/12.2288835
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