18 January 2018 Optical constants and polarimetric properties of AlN thin films
Author Affiliations +
Proceedings Volume 10612, Thirteenth International Conference on Correlation Optics; 106121A (2018) https://doi.org/10.1117/12.2305365
Event: Thirteenth International Conference on Correlation Optics, 2017, Chernivtsi, Ukraine
Abstract
The results of an experimental study of the polarization characteristics of thin films based on aluminum nitride (AlN) are presented. It was found that an increase in the partial pressure of nitrogen (with the appropriate technology for producing the AlN film) leads to a substantial increase in the absorptivity of the film itself and a decrease in its linear dichroism parameter.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu. A. Ushenko, Yu. A. Ushenko, P. D. Maryanchuk, P. D. Maryanchuk, M. M. Solovan, M. M. Solovan, L. J. Pidkamin, L. J. Pidkamin, V. V. Brus, V. V. Brus, } "Optical constants and polarimetric properties of AlN thin films", Proc. SPIE 10612, Thirteenth International Conference on Correlation Optics, 106121A (18 January 2018); doi: 10.1117/12.2305365; https://doi.org/10.1117/12.2305365
PROCEEDINGS
7 PAGES


SHARE
Back to Top