10 January 2018 Parallelism measurement of plane glass at oblique incidence by interferometry
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Abstract
Parallelism is an important parameter of plane glass in high power solid-stat lasers. In this paper, a method for parallelism measurement is proposed. This method is based on total least squares(TLS) to fit wavefront into plane, the parallelism can be calculated by the included angle between planes. Furthermore, with tri-dimensional ray-tracing method, larger aperture plane glass can be measured with smaller interferometer at oblique incidence. A comparison test about parallelism measured at 0° and oblique incidence is set up to verify the accuracy of this method.
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Yi Yang, Lin Zhang, Zhendong Shi, Hua Ma, Huan Ren, Yong He, "Parallelism measurement of plane glass at oblique incidence by interferometry", Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 106160O (10 January 2018); doi: 10.1117/12.2295337; https://doi.org/10.1117/12.2295337
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