10 January 2018 Design and fabrication of directional diffractive device on glass substrate for multiview holographic 3D display
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Abstract
Multiview holographic 3D display based on the nano-grating patterned directional diffractive device can provide 3D images with high resolution and wide viewing angle, which has attracted considerable attention. However, the current directional diffractive device fabricated on the photoresist is vulnerable to damage, which will lead to the short service life of the device. In this paper, we propose a directional diffractive device on glass substrate to increase its service life. In the design process, the period and the orientation of the nano-grating at each pixel are carefully calculated accordingly by the predefined position of the viewing zone, and the groove parameters are designed by analyzing the diffraction efficiency of the nano-grating pixel on glass substrate. In the experiment, a 4-view photoresist directional diffractive device with a full coverage of pixelated nano-grating arrays is efficiently fabricated by using an ultraviolet continuously variable spatial frequency lithography system, and then the nano-grating patterns on the photoresist are transferred to the glass substrate by combining the ion beam etching and the reactive ion beam etching for controlling the groove parameters precisely. The properties of the etched glass device are measured under the illumination of a collimated laser beam with a wavelength of 532nm. The experimental results demonstrate that the light utilization efficiency is improved and optimized in comparison with the photoresist device. Furthermore, the fabricated device on glass substrate is easier to be replicated and of better durability and practicability, which shows great potential in the commercial applications of 3D display terminal.
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Yanfeng Su, Yanfeng Su, Zhijian Cai, Zhijian Cai, Quan Liu, Quan Liu, Wenlong Zou, Wenlong Zou, Peiliang Guo, Peiliang Guo, Jianhong Wu, Jianhong Wu, } "Design and fabrication of directional diffractive device on glass substrate for multiview holographic 3D display", Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 1061616 (10 January 2018); doi: 10.1117/12.2295059; https://doi.org/10.1117/12.2295059
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