10 January 2018 Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection
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Proceedings Volume 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications; 106180O (2018) https://doi.org/10.1117/12.2286076
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China
Abstract
We demonstrate a high-sensitivity fiber-optic Fabry-Perot acoustic sensor based on a thin Parylene-C diaphragm. The vacuum thermal evaporation deposition method is used to fabricate the Parylene-C nanofilm, which possesses strong adhesion and good compactness. Based on these characteristics, the Parylene-C diaphragm is fabricated with 9 mm in diameter and 500 nm in thickness. The noise limited equivalent acoustic signal level is 33.5 μPa/Hz1/2 at the frequency of 30 Hz. The pressure sensitivities of the acoustic sensor are more than 1000 mV/Pa at the frequency from 10 Hz to 30 Hz. The fundamental resonance frequency of the Parylene-C diaphragm is about 13 Hz. The acoustic sensor is applied in a multiple trace gas detection system based on photoacoustic spectroscopy. The detection limits of acetylene (C2H2), carbon monoxide (CO) and carbon dioxide (CO2) are achieved to be 0.25, 0.32 and 1.1 parts-per-million, respectively.
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Z. Gong, Z. Gong, X. Zhou, X. Zhou, K. Chen, K. Chen, X. Zhou, X. Zhou, Q. Yu, Q. Yu, } "Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection", Proc. SPIE 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications, 106180O (10 January 2018); doi: 10.1117/12.2286076; https://doi.org/10.1117/12.2286076
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