10 January 2018 A method for improving the measurement accuracy of lateral shearing interferometry
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Proceedings Volume 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications; 106180P (2018) https://doi.org/10.1117/12.2286323
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China
Abstract
A systematic error calibration method is presented to improve the measurement accuracy of lateral shearing interferometry (LSI). This method is used to remove the most significant errors: geometric optical path difference (OPD) and detector tilt error. Difference fronts in the 0° and 90° directions are used to reconstruct wavefront using difference Zernike polynomial fitting. And difference fronts in the 45° and 135° directions are also used to reconstruct wavefront. The coefficient differences between the reconstructed wavefront are generated from geometric OPD and detector tilt error. The relationship between Zernike coefficient differences and systematic parameters are presented based on shear matrix. Thus, the distance of diffracted light converging point (d) and detector tilt angle can be calculated from the coefficient difference. Based on the calculated d and detector tilt angle, the geometric OPD and detector-tilt induced systematic errors are removed and the measurement accuracy of LSI is improved.
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Jie Li, Jie Li, Feng Tang, Feng Tang, Xiangzhao Wang, Xiangzhao Wang, Rongsheng Ba, Rongsheng Ba, Xinda Zhou, Xinda Zhou, Yinbo Zheng, Yinbo Zheng, Lei Ding, Lei Ding, Bo Chen, Bo Chen, Xiaoyu Yang, Xiaoyu Yang, Jing Yuan, Jing Yuan, } "A method for improving the measurement accuracy of lateral shearing interferometry", Proc. SPIE 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications, 106180P (10 January 2018); doi: 10.1117/12.2286323; https://doi.org/10.1117/12.2286323
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