With the split-step-Fourier-transform method for solving the nonlinear paraxial wave equation, the intensity distribution of the light field when the pits diameter or depth change is obtained by using numerical simulation, include the intensity distribution inside optical element, the beam near-field, the different distances behind the element and the beam far-field. Results show that with the increase of pits diameter or depth, the light field peak intensity and the contrast inside of element corresponding enhancement. The contrast of the intensity distribution of the rear surface of the element will increase slightly. The peak intensity produced by a specific location element downstream of thermal effect will continue to increase, the damage probability in optics placed here is greatly increased. For the intensity distribution of the far-field, increase the pitting diameter or depth will cause the focal spot intensity distribution changes, and the energy of the spectrum center region increase constantly. This work provide a basis for quantitative design and inspection for pitting defects, which provides a reference for the design of optical path arrangement.