12 January 2018 Micro-scanning error correction technique for an optical micro-scanning thermal microscope imaging system
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Abstract
With optical micro-scanning technology, the spatial resolution of the thermal microscope imaging system can be increased without reducing the size of the detector unit or increasing the detector dimensions. Due to optical micro-scanning error, the four low-resolution images collected by micro-scanning thermal micro- scope imaging system are not standard down-sampled images. The reconstructed image quality is degraded by the direct image interpolation with error, which influences the performance of the system. Therefore, the technique to reduce the system micro-scanning error need to be studied. Based on micro-scanning technology and combined with new edge directed interpolation(NEDI) algorithm, an error correction technique for the micro-scanning instrument is proposed. Simulations and experiments show that the proposed technique can reduce the optical micro-scanning error, improve the imaging effect of the system and improve the systems spatial resolution. It can be applied to other electro-optical imaging systems to improve their resolution.
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Mei-Jing Gao, Mei-Jing Gao, Ai-Ling Tan, Ai-Ling Tan, Ming Yang, Ming Yang, Jie Xu, Jie Xu, Zhen-Long Zu, Zhen-Long Zu, Jing-Yuan Wang, Jing-Yuan Wang, } "Micro-scanning error correction technique for an optical micro-scanning thermal microscope imaging system", Proc. SPIE 10620, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology, 106200F (12 January 2018); doi: 10.1117/12.2282762; https://doi.org/10.1117/12.2282762
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