12 January 2018 Phase extracting algorithms analysis in the white-light spectral interferometry
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Abstract
As an optical testing method, white-light spectral interferometry has the characteristics of non-contact, high precision. The phase information can be obtained by analyzing the spectral interference signal of the tested sample, and then the absolute distance is calculated. Fourier transform method, temporal phase-shifting method, spatial phase-shifting method and envelope method can be used to extract the phase information of the spectral interference signal. In this paper, the performance of four methods to extract phase information is simulated and analyzed by using the ideal spectral interference signal. It turns out that temporal phase-shifting method has the performance of high precision, the results of Fourier transform method and envelop method are distorted at the edge of the signal, and spatial phase-shifting method has the worst precision. Adding different levels of white noise to the ideal signal, temporal phase-shifting method is most accurate, while Fourier transform method and envelope method are relatively poor. Finally, the absolute distance measurement experiment is carried out on the constructed test system, and the results are consistent with the simulation ones.
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Tong Guo, Tong Guo, Bingtong Li, Bingtong Li, Minghui Li, Minghui Li, Jinping Chen, Jinping Chen, Xing Fu, Xing Fu, Xiaotang Hu, Xiaotang Hu, } "Phase extracting algorithms analysis in the white-light spectral interferometry", Proc. SPIE 10621, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 106210O (12 January 2018); doi: 10.1117/12.2282449; https://doi.org/10.1117/12.2282449
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