12 January 2018 Real-time micro-vibration multi-spot synchronous measurement within a region based on heterodyne interference
Author Affiliations +
Abstract
Real-time micro-vibration measurement is widely used in engineering applications. It is very difficult for traditional optical detection methods to achieve real-time need in a relatively high frequency and multi-spot synchronous measurement of a region at the same time,especially at the nanoscale. Based on the method of heterodyne interference, an experimental system of real-time measurement of micro - vibration is constructed to satisfy the demand in engineering applications. The vibration response signal is measured by combing optical heterodyne interferometry and a high-speed CMOS-DVR image acquisition system. Then, by extracting and processing multiple pixels at the same time, four digital demodulation technique are implemented to simultaneously acquire the vibrating velocity of the target from the recorded sequences of images. Different kinds of demodulation algorithms are analyzed and the results show that these four demodulation algorithms are suitable for different interference signals. Both autocorrelation algorithm and cross-correlation algorithm meet the needs of real-time measurements. The autocorrelation algorithm demodulates the frequency more accurately, while the cross-correlation algorithm is more accurate in solving the amplitude.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ma Lan, Wen Xiao, Zonghui Chen, Hongliang Hao, Feng Pan, "Real-time micro-vibration multi-spot synchronous measurement within a region based on heterodyne interference", Proc. SPIE 10621, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 1062118 (12 January 2018); doi: 10.1117/12.2292664; https://doi.org/10.1117/12.2292664
PROCEEDINGS
12 PAGES


SHARE
RELATED CONTENT

An object tracking algorithm with embedded gyro information
Proceedings of SPIE (January 23 2017)
New particle tracking velocimetry
Proceedings of SPIE (September 21 1999)
Toward reliable optical flow with subpixel accuracy
Proceedings of SPIE (February 18 2002)
Aspheric surface test by digital moire method
Proceedings of SPIE (November 27 2007)

Back to Top