12 January 2018 Fabrication and performance of a double layered Mn-Co-Ni-O/Mn-Co-Ni-Cu-O thin film detector
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Proceedings Volume 10623, 2017 International Conference on Optical Instruments and Technology: IRMMW-THz Technologies and Applications; 106230Q (2018) https://doi.org/10.1117/12.2296348
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China
Abstract
A thermal sensitive infrared and THz detector was fabricated by a double layered Mn-Co-Ni-O/Mn-Co-Ni-Cu-O films. The Mn-Co-Ni-O material, as one type of transition metal oxides, has long been used as a candidate for thermal sensors or infrared detectors. The resistivity of a most important Mn-Co-Ni-O thin film, Mn1. 96Co0.96Ni0.48O4(MCN) , is about 200 Ω·cm at room temperature, which ranges about 2 orders larger than that of VOx detectors. Therefore, the thickness of a typical squared Mn-Co-Ni-O IR detector should be about 10 μm, which is too large for focal plane arrays applications. To reduce the resistivity of Mn-Co-Ni-O thin film, 1/6 of Co element was replaced by Cu. Meanwhile, a cover layer of MCN film was deposited onto the Mn-Co-Ni-Cu-O film to improve the long term stability. The detector fabricated by the double layered Mn-Co-Ni-O/Mn-Co-Ni-Cu-O films showed large response to blackbody and 170 GHz radiation. The NEP of the detector was estimated to be the order of 10-8 W/Hz0. 5. By applying thermal isolation structure and additional absorption materials, the detection performance can be largely improved by 1-2 orders according to numerical estimation. The double layered Mn-Co-Ni-O film detector shows great potentials in applications in large scale IR detection arrays, and broad-band imaging.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Zhou, Wei Zhou, Yiming Yin, Yiming Yin, Niangjuan Yao, Niangjuan Yao, Lin Jiang, Lin Jiang, Yue Qu, Yue Qu, Jing Wu, Jing Wu, Y. Q. Gao, Y. Q. Gao, Jingguo Huang, Jingguo Huang, Zhiming Huang, Zhiming Huang, } "Fabrication and performance of a double layered Mn-Co-Ni-O/Mn-Co-Ni-Cu-O thin film detector", Proc. SPIE 10623, 2017 International Conference on Optical Instruments and Technology: IRMMW-THz Technologies and Applications, 106230Q (12 January 2018); doi: 10.1117/12.2296348; https://doi.org/10.1117/12.2296348
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