29 May 2018 High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
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Abstract
This paper presents the results of a high-performance digital QVGA-IRFPA based on uncooled microbolometers with a pixel-pitch of 17 μm and a chip-scale-package as the vacuum package developed and fabricated by Fraunhofer-IMS. Due to a direct conversion of the microbolometer’s resistance into a 16 bit value by the use of massively parallel on-chip Sigma-Delta-ADCs a high scene temperature dynamic range of more than 300 K and a very low NETD-value below 50 mK is achieved. Due to a broad-band antireflection coating the digital 17 μm QVGA-IRFPA achieves a high sensitivity in the LWIR (wavelength 8 μm to 14 μm) and MWIR (wavelength 3 μm to 5 μm) range. In this paper the microbolometer, the vacuum-packaging, the architecture of the readout electronics, and the electro-optical performance characterization will be presented.
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Dirk Weiler, Dirk Weiler, Frank Hochschulz, Frank Hochschulz, Claudia Busch, Claudia Busch, Matthias Stein, Matthias Stein, Marvin D. Michel, Marvin D. Michel, Daniel Würfel, Daniel Würfel, Renee Lerch, Renee Lerch, Martin Petermann, Martin Petermann, Thomas Geruschke, Thomas Geruschke, Sebastian Blaeser, Sebastian Blaeser, Sascha Weyers, Sascha Weyers, Holger Vogt, Holger Vogt, "High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout", Proc. SPIE 10624, Infrared Technology and Applications XLIV, 1062419 (29 May 2018); doi: 10.1117/12.2304866; https://doi.org/10.1117/12.2304866
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