29 May 2018 Small uncooled bolometers with a broad spectral response
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Abstract
This paper reports the infrared spectral responses of 17 and 35 μm uncooled bolometers fabricated at INO. They are measured by making use of an external readout circuit along with a monochromator. As expected, the spectral absorption strongly depends on the bolometer stack as well as the pixel layout. By proper selection of design parameters, the spectral response can be made flat from 3 to 14 μm without significant deterioration of the detector figure of merit.
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Francis Généreux, Francis Généreux, Bruno Tremblay, Bruno Tremblay, David Gay, David Gay, Sebastien Deshaies, Sebastien Deshaies, Martin Briand, Martin Briand, Michel Poirier, Michel Poirier, Jean-Sol Caron, Jean-Sol Caron, Jacques-Edmond Paultre, Jacques-Edmond Paultre, David Béland, David Béland, Francis Provençal, Francis Provençal, Daniel Desbiens, Daniel Desbiens, Yan Desroches, Yan Desroches, Christine Alain, Christine Alain, } "Small uncooled bolometers with a broad spectral response", Proc. SPIE 10624, Infrared Technology and Applications XLIV, 106241D (29 May 2018); doi: 10.1117/12.2307290; https://doi.org/10.1117/12.2307290
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