8 May 2018 Characterization of glancing angle deposited (GLAD) optical coatings for UV applications
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Abstract
Controlling for uniformity of an optical coating becomes increasingly difficult for optics with steep curvatures over a large aperture. The growth of a film will inevitably be affected as a function of deposition angle. By exploiting the porosity of a film grown at oblique angles, its refractive index can be tailored to specific applications. An anti-reflective coating deposited on a tilted Corning High-Purity Fused Silica (HPFS) 7980 substrate was characterized for surface and cross-sectional morphologies, crystalline structures, and spectroscopic homogeneity.
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Christopher J. Chinhong, Christopher J. Chinhong, James E. Platten, James E. Platten, Michael J. D'Lallo, Michael J. D'Lallo, Thomas E. Gebo, Thomas E. Gebo, } "Characterization of glancing angle deposited (GLAD) optical coatings for UV applications", Proc. SPIE 10627, Advanced Optics for Defense Applications: UV through LWIR III, 106270F (8 May 2018); doi: 10.1117/12.2310004; https://doi.org/10.1117/12.2310004
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