16 May 2018 Real-time gas analysis using mid-infrared microcavities
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Abstract
In-situ gas analysis was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures were made of ultrathin silicate membranes using the complementary metal-oxide-semiconductor (CMOS) process. Fourier transform infrared spectroscopy (FTIR) shows that the silicate membrane is transparent in the range 2.5 - 6.0 μm, overlapping with gas absorption lines and therefore enables gas detection applications. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands corresponding to functional group stretching: C-H, C-O, and O-N, respectively. A short response time of subsecond and high accuracy of gas identification were achieved. The chip-scale mid-IR sensor is a new platform for an in-situ, remote, and embedded gas monitoring system.
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Tiening Jin, Tiening Jin, Junchao Zhou, Junchao Zhou, Pao Tai Lin, Pao Tai Lin, } "Real-time gas analysis using mid-infrared microcavities", Proc. SPIE 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX, 1062911 (16 May 2018); doi: 10.1117/12.2305429; https://doi.org/10.1117/12.2305429
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