Long-wave and mid-wave infrared micro-bolometers with gold black or wavelength-selective absorbers

Robert E. Peale

doi:10.1117/12.2304681

14 May 2018 Long-wave and mid-wave infrared micro-bolometers with gold black or wavelength-selective absorbers

Robert E. Peale

Proceedings Volume 10656, Image Sensing Technologies: Materials, Devices, Systems, and Applications V; 106560B (2018) https://doi.org/10.1117/12.2304681
Event: SPIE Commercial + Scientific Sensing and Imaging, 2018, Orlando, FL, United States

Abstract

This paper highlights our recent work on wavelength-selective air-bridge infrared bolometers for the 8-12 and 3-5 micron wavelength bands. Gold-black coatings specially protected to enable patterned deposition on bolometer arrays have provided enhanced dual band sensitivity. Subwavelength metal-insulator-metal (MIM) resonant structures were patterned on individual air-bridge bolometers to provide design-tunable enhancement of absorption, which can be engineered to span the 8-12 micron band, or to select narrowly within each considered band for infrared spectral sensing. The choice of MIM dielectric depends critically on refractive-index dispersion at the wavelengths of interest. Integrating the bolometric material within the MIM absorber, and minimizing layer thicknesses, can optimize detector speeds. Deposition of nanocrystalline VO_x and TiO₂ by aqueous-spray heterogeneous chemical reaction is investigated as a means of producing bolometric thin films and MIM dielectrics, respectively.

Conference Presentation

Citation Download Citation

Robert E. Peale "Long-wave and mid-wave infrared micro-bolometers with gold black or wavelength-selective absorbers", Proc. SPIE 10656, Image Sensing Technologies: Materials, Devices, Systems, and Applications V, 106560B (14 May 2018); https://doi.org/10.1117/12.2304681

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