14 May 2018 High resolution 3D imaging of integrated circuits by x-ray ptychography
Author Affiliations +
Significant advances in lithography and chip manufacturing in recent years have resulted in new challenges in metrology of electronic microdevices. Manufacturing process for the 10 nm node is already available and in combination with complex three-dimensional structured interconnections, there is a lack of methods for verification that the final products correspond to the original specifications. X-ray ptycho-tomography is a locally nondestructive imaging method that could potentially help to fill the gap between electron microscopy and conventional X-ray tomography. Quantitativeness of ptycho-tomography provides detailed device geometries and corresponding sensitivity to elemental composition through the complex-valued refractive index. In order to tackle the experimental challenges and improve the imaging quality, new computational methods need to be developed for both ptychography and tomography that can account for a wide range of imperfections such as sample drifts, illumination changes or sample changes during the scan. Here, we will mention the most important of them and possible ways how to deal with them.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michal Odstrcil, Michal Odstrcil, Mirko Holler, Mirko Holler, Jorg Raabe, Jorg Raabe, Manuel Guizar-Sicairos, Manuel Guizar-Sicairos, } "High resolution 3D imaging of integrated circuits by x-ray ptychography", Proc. SPIE 10656, Image Sensing Technologies: Materials, Devices, Systems, and Applications V, 106560U (14 May 2018); doi: 10.1117/12.2304835; https://doi.org/10.1117/12.2304835


Ptychographic nanotomography at the Swiss Light Source
Proceedings of SPIE (September 17 2015)
Refractive lens based full field x ray imaging at 45...
Proceedings of SPIE (September 17 2015)
Zone plate achromatic doublets
Proceedings of SPIE (January 04 2001)
Methods to remove distortion artifacts in scanned projections
Proceedings of SPIE (September 21 1999)
Toward sub 10 nm resolution zone plates using the overlay...
Proceedings of SPIE (February 11 2008)
Status Report On Contact X-Ray Microscopy
Proceedings of SPIE (March 23 1982)

Back to Top