Motion-induced error compensation for 3D shape measurement with phase shifting technique

Ziping Liu; Song Zhang

doi:10.1117/12.2309576

14 May 2018 Motion-induced error compensation for 3D shape measurement with phase shifting technique

Ziping Liu; Song Zhang

Author Affiliations +

Proceedings Volume 10667, Dimensional Optical Metrology and Inspection for Practical Applications VII; 1066707 (2018) https://doi.org/10.1117/12.2309576
Event: SPIE Commercial + Scientific Sensing and Imaging, 2018, Orlando, Florida, United States

Abstract

This paper proposes a motion compensation method to reduce the motion-induced error in phase shifting pro-filometry. We first estimate the motion of an object from the difference between two subsequent 3D frames. After that, by taking the advantage of projector's pinhole model, we can determine the motion-induced phase shifting error from the estimated motion. A generic three-step phase-shifting algorithm considering phase shift error is then utilized to compute the phase. We have conducted quantitative experiments to demonstrate that the proposed algorithm can effectively improve the measurement accuracy without additional information or further constraints.

Conference Presentation

Citation Download Citation

Ziping Liu, Ziping Liu, Song Zhang, Song Zhang, } "Motion-induced error compensation for 3D shape measurement with phase shifting technique", Proc. SPIE 10667, Dimensional Optical Metrology and Inspection for Practical Applications VII, 1066707 (14 May 2018); doi: 10.1117/12.2309576; https://doi.org/10.1117/12.2309576

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