As is well known visible and near infrared beams are able to use ordinary quartz fiber. There are needed some technique about ultraviolet beams. We have been investigating about that, one of the technique is to OH on added to high purity quartz fiber. So in our laboratory, we have obtained 85%/m 248nm beam transmittance in over 200ppm 0 ion added quartz fiber at the milliwatt power regions. On the other hand, we have investigating 308nm beam delivery with the OH ion unadded high purity quartz fiber. The transmittance was over 85%/m , therefore the high purity quartz fiber is usable to XeC1 laser beam delivery systems,we have been investigating also UV-beam delivery with the metal-polymer compound he tube.