22 May 2018 Polarization effects in 3D femtosecond direct laser writing nanolithography
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Abstract
In this work we reveal an influence of polarization of the laser beam on polymerization in direct laser writing. It was experimentally found that the width of suspended lines fabricated in SZ2080, OrmoComp and PETA (pentaerythritol triacrylate) pre-polymers directly depends on the incident polarization and is largest when the angle between the electric field vector and the sample translation direction is α = 90° and the smallest when α = 0°. The size of polymerized structures is consistent with theoretical simulations based on vectorial Debye theory. Experiments were performed by using average laser power corresponding to the middle value of the fabrication window. Polarization was found to be affecting feature sizes while structuring various widespread photoresists, the observed variation was material dependent and measured from 5 to 22% in the line-width. The performed study proves that polarization can be used as a variable parameter for fine tuning of the voxel's aspect ratio.
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Simonas Varapnickas, Simonas Varapnickas, Sima Rekštytė, Sima Rekštytė, Darius Gailevičius, Darius Gailevičius, Etienne Brasselet, Etienne Brasselet, Saulius Juodkazis, Saulius Juodkazis, Mangirdas Malinauskas, Mangirdas Malinauskas, } "Polarization effects in 3D femtosecond direct laser writing nanolithography ", Proc. SPIE 10675, 3D Printed Optics and Additive Photonic Manufacturing, 106750V (22 May 2018); doi: 10.1117/12.2306904; https://doi.org/10.1117/12.2306904
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