Broadband Sb/B4C multilayer mirrors for XUV spectroscopy applications

Eugene A. Vishnyakov; Igor A. Kopylets; Valeriy V. Kondratenko; Alexey O. Kolesnikov; Alexey N. Shatokhin; Evgeny N. Ragozin

doi:10.1117/12.2305926

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24 May 2018 Broadband Sb/B₄C multilayer mirrors for XUV spectroscopy applications

Eugene A. Vishnyakov, Igor A. Kopylets, Valeriy V. Kondratenko, Alexey O. Kolesnikov, Alexey N. Shatokhin, Evgeny N. Ragozin

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Proceedings Volume 10677, Unconventional Optical Imaging; 106772L (2018) https://doi.org/10.1117/12.2305926
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

We have numerically optimized several broadband aperiodic normal-incidence multilayer mirrors based on Sb/B₄C for the 85 – 125 Å spectral domain for spectroscopy applications below the silicon L-edge (λ = 125 Å). Three multilayer mirrors were then synthesized. The designed multilayer structures were optimized for a maximum uniform reflectivity in the 90 – 100, 95 – 105 and 100 – 120 Å wavebands, respectively. All the Sb/B₄C multilayer mirrors were synthesized via magnetron sputtering in argon medium. The multilayers reflection spectra were evaluated with the use of a laboratory XUV spectrograph employing a laser-plasma radiation source, the mirror under study, a transmission diffraction grating and a backside-illuminated CCD matrix. The experimentally recorded spectra were compared with the theoretical ones. Numerical calculations of aperiodic Sb/B₄C multilayer structures with different layer densities are presented. Effects of lower densities and small random variations of the individual layer widths on the reflection spectra are discussed.

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Eugene A. Vishnyakov, Igor A. Kopylets, Valeriy V. Kondratenko, Alexey O. Kolesnikov, Alexey N. Shatokhin, and Evgeny N. Ragozin "Broadband Sb/B₄C multilayer mirrors for XUV spectroscopy applications", Proc. SPIE 10677, Unconventional Optical Imaging, 106772L (24 May 2018); https://doi.org/10.1117/12.2305926

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