In this paper we show that the residual flatness error on a reference sphere measured with a 10X can make the measurement of the radius to have up to 10% error. We analyzed the sources that generate this effect and proposed a method to correct it: we measured a tilted mirror with several angles and characterized the flatness error as a function of the distance to the optical axis, and the tilt angle. New measurements take into account such characterization by assessing the local slopes. We tested the method on calibrated reference spheres and proved to provide correct measurements. We also analyzed this behavior in Laser Scan as well on Microdisplay Scan confocal microscopes.
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Carlos Bermudez, André Felgner, Pol Martinez, Aitor Matilla, Cristina Cadevall, Roger Artigas, "Residual flatness error correction in three-dimensional imaging confocal microscopes," Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 106780M (24 May 2018);